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BOD-Drucksensor: beam-on-diaphragm silicon sensor, laser-fabricated & anisotropic etched pressure sensor, variable Membrandicken unter Druckbelastung

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Name		Name	Last commit message	Last commit date
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ANSYS		ANSYS
Figures		Figures
least-squares-approx		least-squares-approx
paper		paper
README.md		README.md

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BOD-sensor

Pressure sensor

beam-on-diaphragm silicon sensor,
laser-fabricated & anisotropic etched pressure sensor,
variable Membrandicken unter Druckbelastung

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BOD-Drucksensor: beam-on-diaphragm silicon sensor, laser-fabricated & anisotropic etched pressure sensor, variable Membrandicken unter Druckbelastung

experimental sensor mems bod resonant-frequency

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