Download the SEMNano.exe file and run on a Windows PC.
The simulation program “SEM Nano” is used to visualize probe formation in field-emission scanning electron microscopes (SEMs). The program offers an easy and intuitive graphical user interface (GUI) to provide input in terms of understandable SEM parameters and visualization of the output. The simulations are based on wave optics treatment of the electron beam in the SEM column. Based on input parameters provided by the user, the spatial intensity distribution of electrons is calculated at the specimen by incorporating the effects of diffraction, aberrations, coherence, and noise. Given the specimen structure signal (So), the program has the capability to produce an image of the specimen using the electron probe intensity distribution. Finally, a feature is provided to reconstruct the electron probe intensity from the noisy image using a Wiener filter-based deconvolution.
SEM Nano is an open source software developed in the NanoImaging Lab at the Rochester Institute of Technology, NY, USA. This is an open source software and is freely available for use under the MIT License of the open source initiative.
If you use our software in your research to generate results, verification of results or in any kind of analysis that leads to a publication, please state the use of SEM Nano in your publication and cite us.
Reference: S. Kamal & R. Hailstone, SEM Nano: An Electron Wave Optical Simulation for the Scanning Electron Microscope, Microsc Microanal. doi:10.1017/S1431927622000198
If you have any questions or suggestions about the program, please email : [email protected]